1/14/2013	10:13:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2013	10:13:33 AM	Recipe started at 10:13 AM
1/14/2013	10:13:33 AM	Helium valve closed
1/14/2013	10:13:33 AM	H2 valve closed
1/14/2013	10:13:33 AM	BCl3 valve closed
1/14/2013	10:13:33 AM	PH3 valve closed
1/14/2013	10:13:33 AM	SiCl4 pre valve closed
1/14/2013	10:13:33 AM	SiCl4 post valve closed
1/14/2013	10:13:33 AM	Main Vac valve closed
1/14/2013	10:13:33 AM	Bypass valve closed
1/14/2013	10:13:33 AM	Bubbler valve closed
1/14/2013	10:13:33 AM	Helium MFC set to  0.000000
1/14/2013	10:13:33 AM	H2 MFC set to  0.000000
1/14/2013	10:13:33 AM	BCl3 MFC set to  0.000000
1/14/2013	10:13:33 AM	PH3 MFC set to  0.000000
1/14/2013	10:13:33 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:13:33 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:13:33 AM	Tube furnace set to 0
1/14/2013	10:13:36 AM	H2 valve closed
1/14/2013	10:13:36 AM	BCl3 valve closed
1/14/2013	10:13:36 AM	PH3 valve closed
1/14/2013	10:13:36 AM	SiCl4 pre valve closed
1/14/2013	10:13:36 AM	SiCl4 post valve closed
1/14/2013	10:13:36 AM	Main Vac valve closed
1/14/2013	10:13:36 AM	Bypass valve closed
1/14/2013	10:13:36 AM	Bubbler valve closed
1/14/2013	10:13:36 AM	Helium valve opened
1/14/2013	10:13:36 AM	Helium MFC set to  500.000000
1/14/2013	10:13:36 AM	H2 MFC set to  0.000000
1/14/2013	10:13:36 AM	BCl3 MFC set to  0.000000
1/14/2013	10:13:36 AM	PH3 MFC set to  0.000000
1/14/2013	10:13:36 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:13:36 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:13:37 AM	Tube furnace set to 0
1/14/2013	10:14:50 AM	Helium valve closed
1/14/2013	10:14:50 AM	H2 valve closed
1/14/2013	10:14:50 AM	BCl3 valve closed
1/14/2013	10:14:50 AM	PH3 valve closed
1/14/2013	10:14:50 AM	SiCl4 pre valve closed
1/14/2013	10:14:50 AM	SiCl4 post valve closed
1/14/2013	10:14:50 AM	Main Vac valve closed
1/14/2013	10:14:50 AM	Bypass valve closed
1/14/2013	10:14:50 AM	Bubbler valve closed
1/14/2013	10:14:50 AM	Helium MFC set to  0.000000
1/14/2013	10:14:50 AM	H2 MFC set to  0.000000
1/14/2013	10:14:50 AM	BCl3 MFC set to  0.000000
1/14/2013	10:14:50 AM	PH3 MFC set to  0.000000
1/14/2013	10:14:50 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:14:50 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:14:50 AM	Tube furnace set to 0
1/14/2013	10:14:51 AM	Run finished at 10:14 AM
1/14/2013	10:14:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2013	10:16:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2013	10:16:34 AM	Recipe started at 10:16 AM
1/14/2013	10:16:34 AM	Helium valve closed
1/14/2013	10:16:34 AM	H2 valve closed
1/14/2013	10:16:34 AM	BCl3 valve closed
1/14/2013	10:16:34 AM	PH3 valve closed
1/14/2013	10:16:34 AM	SiCl4 pre valve closed
1/14/2013	10:16:34 AM	SiCl4 post valve closed
1/14/2013	10:16:34 AM	Main Vac valve closed
1/14/2013	10:16:34 AM	Bubbler valve closed
1/14/2013	10:16:34 AM	Bypass valve opened
1/14/2013	10:16:34 AM	Helium MFC set to  0.000000
1/14/2013	10:16:34 AM	H2 MFC set to  0.000000
1/14/2013	10:16:34 AM	BCl3 MFC set to  0.000000
1/14/2013	10:16:34 AM	PH3 MFC set to  0.000000
1/14/2013	10:16:34 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:16:34 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:16:34 AM	Tube furnace set to 0
1/14/2013	10:18:08 AM	Run aborted at 10:18 AM
1/14/2013	10:18:08 AM	Helium valve closed
1/14/2013	10:18:08 AM	H2 valve closed
1/14/2013	10:18:08 AM	BCl3 valve closed
1/14/2013	10:18:08 AM	PH3 valve closed
1/14/2013	10:18:08 AM	SiCl4 pre valve closed
1/14/2013	10:18:08 AM	SiCl4 post valve closed
1/14/2013	10:18:08 AM	Bypass valve closed
1/14/2013	10:18:08 AM	Main Vac valve closed
1/14/2013	10:18:08 AM	Bubbler valve closed
1/14/2013	10:18:08 AM	Helium MFC set to  0.000000
1/14/2013	10:18:08 AM	H2 MFC set to  0.000000
1/14/2013	10:18:08 AM	BCl3 MFC set to  0.000000
1/14/2013	10:18:08 AM	PH3 MFC set to  0.000000
1/14/2013	10:18:08 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:18:08 AM	Tube furnace set to 0
1/14/2013	10:18:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2013	10:18:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2013	10:18:11 AM	Recipe started at 10:18 AM
1/14/2013	10:18:11 AM	Helium valve closed
1/14/2013	10:18:11 AM	H2 valve closed
1/14/2013	10:18:11 AM	BCl3 valve closed
1/14/2013	10:18:11 AM	PH3 valve closed
1/14/2013	10:18:11 AM	SiCl4 pre valve closed
1/14/2013	10:18:11 AM	SiCl4 post valve closed
1/14/2013	10:18:11 AM	Main Vac valve closed
1/14/2013	10:18:11 AM	Bypass valve closed
1/14/2013	10:18:11 AM	Bubbler valve closed
1/14/2013	10:18:11 AM	Helium MFC set to  0.000000
1/14/2013	10:18:11 AM	H2 MFC set to  0.000000
1/14/2013	10:18:11 AM	BCl3 MFC set to  0.000000
1/14/2013	10:18:11 AM	PH3 MFC set to  0.000000
1/14/2013	10:18:11 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:18:11 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:18:11 AM	Tube furnace set to 0
1/14/2013	10:18:14 AM	H2 valve closed
1/14/2013	10:18:14 AM	BCl3 valve closed
1/14/2013	10:18:14 AM	PH3 valve closed
1/14/2013	10:18:14 AM	SiCl4 pre valve closed
1/14/2013	10:18:14 AM	SiCl4 post valve closed
1/14/2013	10:18:14 AM	Main Vac valve closed
1/14/2013	10:18:14 AM	Bypass valve closed
1/14/2013	10:18:14 AM	Bubbler valve closed
1/14/2013	10:18:14 AM	Helium valve opened
1/14/2013	10:18:14 AM	Helium MFC set to  500.000000
1/14/2013	10:18:14 AM	H2 MFC set to  0.000000
1/14/2013	10:18:14 AM	BCl3 MFC set to  0.000000
1/14/2013	10:18:14 AM	PH3 MFC set to  0.000000
1/14/2013	10:18:14 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:18:14 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:18:14 AM	Tube furnace set to 0
1/14/2013	10:18:26 AM	Helium valve closed
1/14/2013	10:18:26 AM	H2 valve closed
1/14/2013	10:18:26 AM	BCl3 valve closed
1/14/2013	10:18:26 AM	PH3 valve closed
1/14/2013	10:18:26 AM	SiCl4 pre valve closed
1/14/2013	10:18:26 AM	SiCl4 post valve closed
1/14/2013	10:18:26 AM	Main Vac valve closed
1/14/2013	10:18:26 AM	Bypass valve closed
1/14/2013	10:18:26 AM	Bubbler valve closed
1/14/2013	10:18:26 AM	Helium MFC set to  0.000000
1/14/2013	10:18:26 AM	H2 MFC set to  0.000000
1/14/2013	10:18:26 AM	BCl3 MFC set to  0.000000
1/14/2013	10:18:26 AM	PH3 MFC set to  0.000000
1/14/2013	10:18:26 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:18:26 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:18:27 AM	Tube furnace set to 0
1/14/2013	10:18:28 AM	Run finished at 10:18 AM
1/14/2013	10:18:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2013	10:20:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2013	10:20:06 AM	Recipe started at 10:20 AM
1/14/2013	10:20:06 AM	Helium valve closed
1/14/2013	10:20:06 AM	H2 valve closed
1/14/2013	10:20:06 AM	BCl3 valve closed
1/14/2013	10:20:06 AM	PH3 valve closed
1/14/2013	10:20:06 AM	SiCl4 pre valve closed
1/14/2013	10:20:06 AM	SiCl4 post valve closed
1/14/2013	10:20:06 AM	Main Vac valve closed
1/14/2013	10:20:06 AM	Bubbler valve closed
1/14/2013	10:20:06 AM	Bypass valve opened
1/14/2013	10:20:06 AM	Helium MFC set to  0.000000
1/14/2013	10:20:06 AM	H2 MFC set to  0.000000
1/14/2013	10:20:06 AM	BCl3 MFC set to  0.000000
1/14/2013	10:20:06 AM	PH3 MFC set to  0.000000
1/14/2013	10:20:06 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:20:06 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:20:06 AM	Tube furnace set to 0
1/14/2013	10:21:33 AM	Helium valve closed
1/14/2013	10:21:33 AM	H2 valve closed
1/14/2013	10:21:33 AM	BCl3 valve closed
1/14/2013	10:21:33 AM	PH3 valve closed
1/14/2013	10:21:33 AM	SiCl4 pre valve closed
1/14/2013	10:21:33 AM	SiCl4 post valve closed
1/14/2013	10:21:33 AM	Main Vac valve closed
1/14/2013	10:21:33 AM	Bubbler valve closed
1/14/2013	10:21:33 AM	Bypass valve opened
1/14/2013	10:21:33 AM	Helium MFC set to  0.000000
1/14/2013	10:21:33 AM	H2 MFC set to  0.000000
1/14/2013	10:21:33 AM	BCl3 MFC set to  0.000000
1/14/2013	10:21:33 AM	PH3 MFC set to  0.000000
1/14/2013	10:21:33 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:21:33 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:21:33 AM	Tube furnace set to 0
1/14/2013	10:21:43 AM	Helium valve closed
1/14/2013	10:21:43 AM	H2 valve closed
1/14/2013	10:21:43 AM	BCl3 valve closed
1/14/2013	10:21:43 AM	PH3 valve closed
1/14/2013	10:21:43 AM	SiCl4 pre valve closed
1/14/2013	10:21:43 AM	SiCl4 post valve closed
1/14/2013	10:21:43 AM	Bypass valve closed
1/14/2013	10:21:43 AM	Bubbler valve closed
1/14/2013	10:21:43 AM	Main Vac valve opened
1/14/2013	10:21:43 AM	Helium MFC set to  0.000000
1/14/2013	10:21:43 AM	H2 MFC set to  0.000000
1/14/2013	10:21:43 AM	BCl3 MFC set to  0.000000
1/14/2013	10:21:43 AM	PH3 MFC set to  0.000000
1/14/2013	10:21:43 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:21:43 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:21:43 AM	Tube furnace set to 0
1/14/2013	10:21:44 AM	Run finished at 10:21 AM
1/14/2013	10:21:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2013	10:21:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2013	10:21:56 AM	Recipe started at 10:21 AM
1/14/2013	10:21:56 AM	Helium valve closed
1/14/2013	10:21:56 AM	H2 valve closed
1/14/2013	10:21:56 AM	BCl3 valve closed
1/14/2013	10:21:56 AM	PH3 valve closed
1/14/2013	10:21:56 AM	SiCl4 pre valve closed
1/14/2013	10:21:56 AM	SiCl4 post valve closed
1/14/2013	10:21:56 AM	Main Vac valve closed
1/14/2013	10:21:56 AM	Bypass valve closed
1/14/2013	10:21:56 AM	Bubbler valve closed
1/14/2013	10:21:56 AM	Helium MFC set to  0.000000
1/14/2013	10:21:56 AM	H2 MFC set to  0.000000
1/14/2013	10:21:56 AM	BCl3 MFC set to  0.000000
1/14/2013	10:21:56 AM	PH3 MFC set to  0.000000
1/14/2013	10:21:56 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:21:56 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:21:57 AM	Tube furnace set to 0
1/14/2013	10:22:00 AM	H2 valve closed
1/14/2013	10:22:00 AM	BCl3 valve closed
1/14/2013	10:22:00 AM	PH3 valve closed
1/14/2013	10:22:00 AM	SiCl4 pre valve closed
1/14/2013	10:22:00 AM	SiCl4 post valve closed
1/14/2013	10:22:00 AM	Main Vac valve closed
1/14/2013	10:22:00 AM	Bypass valve closed
1/14/2013	10:22:00 AM	Bubbler valve closed
1/14/2013	10:22:00 AM	Helium valve opened
1/14/2013	10:22:00 AM	Helium MFC set to  500.000000
1/14/2013	10:22:00 AM	H2 MFC set to  0.000000
1/14/2013	10:22:00 AM	BCl3 MFC set to  0.000000
1/14/2013	10:22:00 AM	PH3 MFC set to  0.000000
1/14/2013	10:22:00 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:22:00 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:22:00 AM	Tube furnace set to 0
1/14/2013	10:23:14 AM	Helium valve closed
1/14/2013	10:23:14 AM	H2 valve closed
1/14/2013	10:23:14 AM	BCl3 valve closed
1/14/2013	10:23:14 AM	PH3 valve closed
1/14/2013	10:23:14 AM	SiCl4 pre valve closed
1/14/2013	10:23:14 AM	SiCl4 post valve closed
1/14/2013	10:23:14 AM	Main Vac valve closed
1/14/2013	10:23:14 AM	Bypass valve closed
1/14/2013	10:23:14 AM	Bubbler valve closed
1/14/2013	10:23:14 AM	Helium MFC set to  0.000000
1/14/2013	10:23:14 AM	H2 MFC set to  0.000000
1/14/2013	10:23:14 AM	BCl3 MFC set to  0.000000
1/14/2013	10:23:14 AM	PH3 MFC set to  0.000000
1/14/2013	10:23:14 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:23:14 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:23:14 AM	Tube furnace set to 0
1/14/2013	10:23:15 AM	Run finished at 10:23 AM
1/14/2013	10:23:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2013	10:25:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2013	10:25:54 AM	Recipe started at 10:25 AM
1/14/2013	10:25:54 AM	Helium valve closed
1/14/2013	10:25:54 AM	H2 valve closed
1/14/2013	10:25:54 AM	BCl3 valve closed
1/14/2013	10:25:54 AM	PH3 valve closed
1/14/2013	10:25:54 AM	SiCl4 pre valve closed
1/14/2013	10:25:54 AM	SiCl4 post valve closed
1/14/2013	10:25:54 AM	Main Vac valve closed
1/14/2013	10:25:54 AM	Bubbler valve closed
1/14/2013	10:25:54 AM	Bypass valve opened
1/14/2013	10:25:54 AM	Helium MFC set to  0.000000
1/14/2013	10:25:54 AM	H2 MFC set to  0.000000
1/14/2013	10:25:54 AM	BCl3 MFC set to  0.000000
1/14/2013	10:25:54 AM	PH3 MFC set to  0.000000
1/14/2013	10:25:54 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:25:54 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:25:54 AM	Tube furnace set to 0
1/14/2013	10:26:38 AM	Run aborted at 10:26 AM
1/14/2013	10:26:38 AM	Helium valve closed
1/14/2013	10:26:38 AM	H2 valve closed
1/14/2013	10:26:38 AM	BCl3 valve closed
1/14/2013	10:26:38 AM	PH3 valve closed
1/14/2013	10:26:38 AM	SiCl4 pre valve closed
1/14/2013	10:26:38 AM	SiCl4 post valve closed
1/14/2013	10:26:38 AM	Bypass valve closed
1/14/2013	10:26:38 AM	Main Vac valve closed
1/14/2013	10:26:38 AM	Bubbler valve closed
1/14/2013	10:26:38 AM	Helium MFC set to  0.000000
1/14/2013	10:26:38 AM	H2 MFC set to  0.000000
1/14/2013	10:26:38 AM	BCl3 MFC set to  0.000000
1/14/2013	10:26:38 AM	PH3 MFC set to  0.000000
1/14/2013	10:26:38 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:26:39 AM	Tube furnace set to 0
1/14/2013	10:26:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2013	10:26:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2013	10:26:52 AM	Recipe started at 10:26 AM
1/14/2013	10:26:52 AM	Helium valve closed
1/14/2013	10:26:52 AM	H2 valve closed
1/14/2013	10:26:52 AM	BCl3 valve closed
1/14/2013	10:26:52 AM	PH3 valve closed
1/14/2013	10:26:52 AM	SiCl4 pre valve closed
1/14/2013	10:26:52 AM	SiCl4 post valve closed
1/14/2013	10:26:52 AM	Main Vac valve closed
1/14/2013	10:26:52 AM	Bypass valve closed
1/14/2013	10:26:52 AM	Bubbler valve closed
1/14/2013	10:26:52 AM	Helium MFC set to  0.000000
1/14/2013	10:26:52 AM	H2 MFC set to  0.000000
1/14/2013	10:26:52 AM	BCl3 MFC set to  0.000000
1/14/2013	10:26:52 AM	PH3 MFC set to  0.000000
1/14/2013	10:26:52 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:26:52 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:26:52 AM	Tube furnace set to 0
1/14/2013	10:26:55 AM	H2 valve closed
1/14/2013	10:26:55 AM	BCl3 valve closed
1/14/2013	10:26:55 AM	PH3 valve closed
1/14/2013	10:26:55 AM	SiCl4 pre valve closed
1/14/2013	10:26:55 AM	SiCl4 post valve closed
1/14/2013	10:26:55 AM	Main Vac valve closed
1/14/2013	10:26:55 AM	Bypass valve closed
1/14/2013	10:26:55 AM	Bubbler valve closed
1/14/2013	10:26:55 AM	Helium valve opened
1/14/2013	10:26:55 AM	Helium MFC set to  500.000000
1/14/2013	10:26:55 AM	H2 MFC set to  0.000000
1/14/2013	10:26:55 AM	BCl3 MFC set to  0.000000
1/14/2013	10:26:55 AM	PH3 MFC set to  0.000000
1/14/2013	10:26:55 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:26:55 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:26:56 AM	Tube furnace set to 0
1/14/2013	10:26:56 AM	Helium valve closed
1/14/2013	10:26:56 AM	H2 valve closed
1/14/2013	10:26:56 AM	BCl3 valve closed
1/14/2013	10:26:56 AM	PH3 valve closed
1/14/2013	10:26:56 AM	SiCl4 pre valve closed
1/14/2013	10:26:56 AM	SiCl4 post valve closed
1/14/2013	10:26:56 AM	Main Vac valve closed
1/14/2013	10:26:56 AM	Bypass valve closed
1/14/2013	10:26:56 AM	Bubbler valve closed
1/14/2013	10:26:56 AM	Helium MFC set to  0.000000
1/14/2013	10:26:56 AM	H2 MFC set to  0.000000
1/14/2013	10:26:56 AM	BCl3 MFC set to  0.000000
1/14/2013	10:26:56 AM	PH3 MFC set to  0.000000
1/14/2013	10:26:56 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:26:56 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:26:56 AM	Tube furnace set to 0
1/14/2013	10:26:57 AM	Run finished at 10:26 AM
1/14/2013	10:26:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2013	10:28:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2013	10:28:05 AM	Recipe started at 10:28 AM
1/14/2013	10:28:05 AM	Helium valve closed
1/14/2013	10:28:05 AM	H2 valve closed
1/14/2013	10:28:05 AM	BCl3 valve closed
1/14/2013	10:28:05 AM	PH3 valve closed
1/14/2013	10:28:05 AM	SiCl4 pre valve closed
1/14/2013	10:28:05 AM	SiCl4 post valve closed
1/14/2013	10:28:05 AM	Main Vac valve closed
1/14/2013	10:28:05 AM	Bubbler valve closed
1/14/2013	10:28:05 AM	Bypass valve opened
1/14/2013	10:28:05 AM	Helium MFC set to  0.000000
1/14/2013	10:28:05 AM	H2 MFC set to  0.000000
1/14/2013	10:28:05 AM	BCl3 MFC set to  0.000000
1/14/2013	10:28:05 AM	PH3 MFC set to  0.000000
1/14/2013	10:28:05 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:28:05 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:28:06 AM	Tube furnace set to 0
1/14/2013	10:29:31 AM	Helium valve closed
1/14/2013	10:29:31 AM	H2 valve closed
1/14/2013	10:29:31 AM	BCl3 valve closed
1/14/2013	10:29:31 AM	PH3 valve closed
1/14/2013	10:29:31 AM	SiCl4 pre valve closed
1/14/2013	10:29:31 AM	SiCl4 post valve closed
1/14/2013	10:29:31 AM	Main Vac valve closed
1/14/2013	10:29:31 AM	Bubbler valve closed
1/14/2013	10:29:31 AM	Bypass valve opened
1/14/2013	10:29:31 AM	Helium MFC set to  0.000000
1/14/2013	10:29:31 AM	H2 MFC set to  0.000000
1/14/2013	10:29:31 AM	BCl3 MFC set to  0.000000
1/14/2013	10:29:31 AM	PH3 MFC set to  0.000000
1/14/2013	10:29:31 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:29:31 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:29:31 AM	Tube furnace set to 0
1/14/2013	10:29:32 AM	Run aborted at 10:29 AM
1/14/2013	10:29:32 AM	Helium valve closed
1/14/2013	10:29:32 AM	H2 valve closed
1/14/2013	10:29:32 AM	BCl3 valve closed
1/14/2013	10:29:32 AM	PH3 valve closed
1/14/2013	10:29:32 AM	SiCl4 pre valve closed
1/14/2013	10:29:32 AM	SiCl4 post valve closed
1/14/2013	10:29:32 AM	Bypass valve closed
1/14/2013	10:29:32 AM	Main Vac valve closed
1/14/2013	10:29:32 AM	Bubbler valve closed
1/14/2013	10:29:32 AM	Helium MFC set to  0.000000
1/14/2013	10:29:32 AM	H2 MFC set to  0.000000
1/14/2013	10:29:32 AM	BCl3 MFC set to  0.000000
1/14/2013	10:29:32 AM	PH3 MFC set to  0.000000
1/14/2013	10:29:32 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:29:32 AM	Tube furnace set to 0
1/14/2013	10:29:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2013	10:29:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2013	10:29:35 AM	Recipe started at 10:29 AM
1/14/2013	10:29:35 AM	Helium valve closed
1/14/2013	10:29:35 AM	H2 valve closed
1/14/2013	10:29:35 AM	BCl3 valve closed
1/14/2013	10:29:35 AM	PH3 valve closed
1/14/2013	10:29:35 AM	SiCl4 pre valve closed
1/14/2013	10:29:35 AM	SiCl4 post valve closed
1/14/2013	10:29:35 AM	Main Vac valve closed
1/14/2013	10:29:35 AM	Bypass valve closed
1/14/2013	10:29:35 AM	Bubbler valve closed
1/14/2013	10:29:35 AM	Helium MFC set to  0.000000
1/14/2013	10:29:35 AM	H2 MFC set to  0.000000
1/14/2013	10:29:35 AM	BCl3 MFC set to  0.000000
1/14/2013	10:29:35 AM	PH3 MFC set to  0.000000
1/14/2013	10:29:35 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:29:35 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:29:35 AM	Tube furnace set to 0
1/14/2013	10:29:38 AM	H2 valve closed
1/14/2013	10:29:38 AM	BCl3 valve closed
1/14/2013	10:29:38 AM	PH3 valve closed
1/14/2013	10:29:38 AM	SiCl4 pre valve closed
1/14/2013	10:29:38 AM	SiCl4 post valve closed
1/14/2013	10:29:38 AM	Main Vac valve closed
1/14/2013	10:29:38 AM	Bypass valve closed
1/14/2013	10:29:38 AM	Bubbler valve closed
1/14/2013	10:29:38 AM	Helium valve opened
1/14/2013	10:29:38 AM	Helium MFC set to  500.000000
1/14/2013	10:29:38 AM	H2 MFC set to  0.000000
1/14/2013	10:29:38 AM	BCl3 MFC set to  0.000000
1/14/2013	10:29:38 AM	PH3 MFC set to  0.000000
1/14/2013	10:29:38 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:29:38 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:29:38 AM	Tube furnace set to 0
1/14/2013	10:30:44 AM	Helium valve closed
1/14/2013	10:30:44 AM	H2 valve closed
1/14/2013	10:30:44 AM	BCl3 valve closed
1/14/2013	10:30:44 AM	PH3 valve closed
1/14/2013	10:30:44 AM	SiCl4 pre valve closed
1/14/2013	10:30:44 AM	SiCl4 post valve closed
1/14/2013	10:30:44 AM	Main Vac valve closed
1/14/2013	10:30:44 AM	Bypass valve closed
1/14/2013	10:30:44 AM	Bubbler valve closed
1/14/2013	10:30:44 AM	Helium MFC set to  0.000000
1/14/2013	10:30:44 AM	H2 MFC set to  0.000000
1/14/2013	10:30:44 AM	BCl3 MFC set to  0.000000
1/14/2013	10:30:44 AM	PH3 MFC set to  0.000000
1/14/2013	10:30:44 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:30:44 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:30:44 AM	Tube furnace set to 0
1/14/2013	10:30:45 AM	Run finished at 10:30 AM
1/14/2013	10:30:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2013	10:33:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2013	10:33:42 AM	Recipe started at 10:33 AM
1/14/2013	10:33:42 AM	Helium valve closed
1/14/2013	10:33:42 AM	H2 valve closed
1/14/2013	10:33:42 AM	BCl3 valve closed
1/14/2013	10:33:42 AM	PH3 valve closed
1/14/2013	10:33:42 AM	SiCl4 pre valve closed
1/14/2013	10:33:42 AM	SiCl4 post valve closed
1/14/2013	10:33:42 AM	Main Vac valve closed
1/14/2013	10:33:42 AM	Bubbler valve closed
1/14/2013	10:33:42 AM	Bypass valve opened
1/14/2013	10:33:42 AM	Helium MFC set to  0.000000
1/14/2013	10:33:42 AM	H2 MFC set to  0.000000
1/14/2013	10:33:42 AM	BCl3 MFC set to  0.000000
1/14/2013	10:33:42 AM	PH3 MFC set to  0.000000
1/14/2013	10:33:42 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:33:42 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:33:42 AM	Tube furnace set to 0
1/14/2013	10:34:58 AM	Run aborted at 10:34 AM
1/14/2013	10:34:58 AM	Helium valve closed
1/14/2013	10:34:58 AM	H2 valve closed
1/14/2013	10:34:58 AM	BCl3 valve closed
1/14/2013	10:34:58 AM	PH3 valve closed
1/14/2013	10:34:58 AM	SiCl4 pre valve closed
1/14/2013	10:34:58 AM	SiCl4 post valve closed
1/14/2013	10:34:58 AM	Bypass valve closed
1/14/2013	10:34:58 AM	Main Vac valve closed
1/14/2013	10:34:58 AM	Bubbler valve closed
1/14/2013	10:34:58 AM	Helium MFC set to  0.000000
1/14/2013	10:34:58 AM	H2 MFC set to  0.000000
1/14/2013	10:34:58 AM	BCl3 MFC set to  0.000000
1/14/2013	10:34:58 AM	PH3 MFC set to  0.000000
1/14/2013	10:34:58 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:34:58 AM	Tube furnace set to 0
1/14/2013	10:34:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2013	10:35:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2013	10:35:01 AM	Recipe started at 10:35 AM
1/14/2013	10:35:01 AM	Helium valve closed
1/14/2013	10:35:01 AM	H2 valve closed
1/14/2013	10:35:01 AM	BCl3 valve closed
1/14/2013	10:35:01 AM	PH3 valve closed
1/14/2013	10:35:01 AM	SiCl4 pre valve closed
1/14/2013	10:35:01 AM	SiCl4 post valve closed
1/14/2013	10:35:01 AM	Main Vac valve closed
1/14/2013	10:35:01 AM	Bypass valve closed
1/14/2013	10:35:01 AM	Bubbler valve closed
1/14/2013	10:35:01 AM	Helium MFC set to  0.000000
1/14/2013	10:35:01 AM	H2 MFC set to  0.000000
1/14/2013	10:35:01 AM	BCl3 MFC set to  0.000000
1/14/2013	10:35:01 AM	PH3 MFC set to  0.000000
1/14/2013	10:35:01 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:35:01 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:35:01 AM	Tube furnace set to 0
1/14/2013	10:35:04 AM	H2 valve closed
1/14/2013	10:35:04 AM	BCl3 valve closed
1/14/2013	10:35:04 AM	PH3 valve closed
1/14/2013	10:35:04 AM	SiCl4 pre valve closed
1/14/2013	10:35:04 AM	SiCl4 post valve closed
1/14/2013	10:35:04 AM	Main Vac valve closed
1/14/2013	10:35:04 AM	Bypass valve closed
1/14/2013	10:35:04 AM	Bubbler valve closed
1/14/2013	10:35:04 AM	Helium valve opened
1/14/2013	10:35:04 AM	Helium MFC set to  500.000000
1/14/2013	10:35:04 AM	H2 MFC set to  0.000000
1/14/2013	10:35:04 AM	BCl3 MFC set to  0.000000
1/14/2013	10:35:04 AM	PH3 MFC set to  0.000000
1/14/2013	10:35:04 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:35:04 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:35:05 AM	Tube furnace set to 0
1/14/2013	10:35:22 AM	Helium valve closed
1/14/2013	10:35:22 AM	H2 valve closed
1/14/2013	10:35:22 AM	BCl3 valve closed
1/14/2013	10:35:22 AM	PH3 valve closed
1/14/2013	10:35:22 AM	SiCl4 pre valve closed
1/14/2013	10:35:22 AM	SiCl4 post valve closed
1/14/2013	10:35:22 AM	Main Vac valve closed
1/14/2013	10:35:22 AM	Bypass valve closed
1/14/2013	10:35:22 AM	Bubbler valve closed
1/14/2013	10:35:22 AM	Helium MFC set to  0.000000
1/14/2013	10:35:22 AM	H2 MFC set to  0.000000
1/14/2013	10:35:22 AM	BCl3 MFC set to  0.000000
1/14/2013	10:35:22 AM	PH3 MFC set to  0.000000
1/14/2013	10:35:22 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:35:22 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:35:22 AM	Tube furnace set to 0
1/14/2013	10:35:23 AM	Run finished at 10:35 AM
1/14/2013	10:35:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2013	10:52:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2013	10:52:29 AM	Recipe started at 10:52 AM
1/14/2013	10:52:29 AM	Helium valve closed
1/14/2013	10:52:29 AM	H2 valve closed
1/14/2013	10:52:29 AM	BCl3 valve closed
1/14/2013	10:52:29 AM	PH3 valve closed
1/14/2013	10:52:29 AM	SiCl4 pre valve closed
1/14/2013	10:52:29 AM	SiCl4 post valve closed
1/14/2013	10:52:29 AM	Main Vac valve closed
1/14/2013	10:52:29 AM	Bubbler valve closed
1/14/2013	10:52:29 AM	Bypass valve opened
1/14/2013	10:52:29 AM	Helium MFC set to  0.000000
1/14/2013	10:52:29 AM	H2 MFC set to  0.000000
1/14/2013	10:52:29 AM	BCl3 MFC set to  0.000000
1/14/2013	10:52:29 AM	PH3 MFC set to  0.000000
1/14/2013	10:52:29 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:52:29 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:52:29 AM	Tube furnace set to 0
1/14/2013	10:53:18 AM	Run aborted at 10:53 AM
1/14/2013	10:53:18 AM	Helium valve closed
1/14/2013	10:53:18 AM	H2 valve closed
1/14/2013	10:53:18 AM	BCl3 valve closed
1/14/2013	10:53:18 AM	PH3 valve closed
1/14/2013	10:53:18 AM	SiCl4 pre valve closed
1/14/2013	10:53:18 AM	SiCl4 post valve closed
1/14/2013	10:53:18 AM	Bypass valve closed
1/14/2013	10:53:18 AM	Main Vac valve closed
1/14/2013	10:53:18 AM	Bubbler valve closed
1/14/2013	10:53:18 AM	Helium MFC set to  0.000000
1/14/2013	10:53:18 AM	H2 MFC set to  0.000000
1/14/2013	10:53:18 AM	BCl3 MFC set to  0.000000
1/14/2013	10:53:18 AM	PH3 MFC set to  0.000000
1/14/2013	10:53:18 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:53:18 AM	Tube furnace set to 0
1/14/2013	10:53:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2013	10:53:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2013	10:53:20 AM	Recipe started at 10:53 AM
1/14/2013	10:53:21 AM	Helium valve closed
1/14/2013	10:53:21 AM	H2 valve closed
1/14/2013	10:53:21 AM	BCl3 valve closed
1/14/2013	10:53:21 AM	PH3 valve closed
1/14/2013	10:53:21 AM	SiCl4 pre valve closed
1/14/2013	10:53:21 AM	SiCl4 post valve closed
1/14/2013	10:53:21 AM	Main Vac valve closed
1/14/2013	10:53:21 AM	Bypass valve closed
1/14/2013	10:53:21 AM	Bubbler valve closed
1/14/2013	10:53:21 AM	Helium MFC set to  0.000000
1/14/2013	10:53:21 AM	H2 MFC set to  0.000000
1/14/2013	10:53:21 AM	BCl3 MFC set to  0.000000
1/14/2013	10:53:21 AM	PH3 MFC set to  0.000000
1/14/2013	10:53:21 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:53:21 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:53:21 AM	Tube furnace set to 0
1/14/2013	10:53:24 AM	H2 valve closed
1/14/2013	10:53:24 AM	BCl3 valve closed
1/14/2013	10:53:24 AM	PH3 valve closed
1/14/2013	10:53:24 AM	SiCl4 pre valve closed
1/14/2013	10:53:24 AM	SiCl4 post valve closed
1/14/2013	10:53:24 AM	Main Vac valve closed
1/14/2013	10:53:24 AM	Bypass valve closed
1/14/2013	10:53:24 AM	Bubbler valve closed
1/14/2013	10:53:24 AM	Helium valve opened
1/14/2013	10:53:24 AM	Helium MFC set to  500.000000
1/14/2013	10:53:24 AM	H2 MFC set to  0.000000
1/14/2013	10:53:24 AM	BCl3 MFC set to  0.000000
1/14/2013	10:53:24 AM	PH3 MFC set to  0.000000
1/14/2013	10:53:24 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:53:24 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:53:24 AM	Tube furnace set to 0
1/14/2013	10:53:43 AM	Helium valve closed
1/14/2013	10:53:43 AM	H2 valve closed
1/14/2013	10:53:43 AM	BCl3 valve closed
1/14/2013	10:53:43 AM	PH3 valve closed
1/14/2013	10:53:43 AM	SiCl4 pre valve closed
1/14/2013	10:53:43 AM	SiCl4 post valve closed
1/14/2013	10:53:43 AM	Main Vac valve closed
1/14/2013	10:53:43 AM	Bypass valve closed
1/14/2013	10:53:43 AM	Bubbler valve closed
1/14/2013	10:53:43 AM	Helium MFC set to  0.000000
1/14/2013	10:53:43 AM	H2 MFC set to  0.000000
1/14/2013	10:53:43 AM	BCl3 MFC set to  0.000000
1/14/2013	10:53:43 AM	PH3 MFC set to  0.000000
1/14/2013	10:53:43 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:53:43 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:53:43 AM	Tube furnace set to 0
1/14/2013	10:53:44 AM	Run finished at 10:53 AM
1/14/2013	10:53:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2013	10:55:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2013	10:55:31 AM	Recipe started at 10:55 AM
1/14/2013	10:55:31 AM	Helium valve closed
1/14/2013	10:55:31 AM	H2 valve closed
1/14/2013	10:55:31 AM	BCl3 valve closed
1/14/2013	10:55:31 AM	PH3 valve closed
1/14/2013	10:55:31 AM	SiCl4 pre valve closed
1/14/2013	10:55:31 AM	SiCl4 post valve closed
1/14/2013	10:55:31 AM	Main Vac valve closed
1/14/2013	10:55:31 AM	Bubbler valve closed
1/14/2013	10:55:31 AM	Bypass valve opened
1/14/2013	10:55:31 AM	Helium MFC set to  0.000000
1/14/2013	10:55:31 AM	H2 MFC set to  0.000000
1/14/2013	10:55:31 AM	BCl3 MFC set to  0.000000
1/14/2013	10:55:31 AM	PH3 MFC set to  0.000000
1/14/2013	10:55:31 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:55:31 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:55:31 AM	Tube furnace set to 0
1/14/2013	10:57:01 AM	Helium valve closed
1/14/2013	10:57:01 AM	H2 valve closed
1/14/2013	10:57:01 AM	BCl3 valve closed
1/14/2013	10:57:01 AM	PH3 valve closed
1/14/2013	10:57:01 AM	SiCl4 pre valve closed
1/14/2013	10:57:01 AM	SiCl4 post valve closed
1/14/2013	10:57:01 AM	Main Vac valve closed
1/14/2013	10:57:01 AM	Bubbler valve closed
1/14/2013	10:57:01 AM	Bypass valve opened
1/14/2013	10:57:01 AM	Helium MFC set to  0.000000
1/14/2013	10:57:01 AM	H2 MFC set to  0.000000
1/14/2013	10:57:01 AM	BCl3 MFC set to  0.000000
1/14/2013	10:57:01 AM	PH3 MFC set to  0.000000
1/14/2013	10:57:01 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:57:01 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:57:02 AM	Tube furnace set to 0
1/14/2013	10:57:17 AM	Run aborted at 10:57 AM
1/14/2013	10:57:17 AM	Helium valve closed
1/14/2013	10:57:17 AM	H2 valve closed
1/14/2013	10:57:17 AM	BCl3 valve closed
1/14/2013	10:57:17 AM	PH3 valve closed
1/14/2013	10:57:17 AM	SiCl4 pre valve closed
1/14/2013	10:57:17 AM	SiCl4 post valve closed
1/14/2013	10:57:17 AM	Bypass valve closed
1/14/2013	10:57:17 AM	Main Vac valve closed
1/14/2013	10:57:17 AM	Bubbler valve closed
1/14/2013	10:57:17 AM	Helium MFC set to  0.000000
1/14/2013	10:57:17 AM	H2 MFC set to  0.000000
1/14/2013	10:57:17 AM	BCl3 MFC set to  0.000000
1/14/2013	10:57:17 AM	PH3 MFC set to  0.000000
1/14/2013	10:57:17 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:57:18 AM	Tube furnace set to 0
1/14/2013	10:57:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2013	10:57:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2013	10:57:20 AM	Recipe started at 10:57 AM
1/14/2013	10:57:20 AM	Helium valve closed
1/14/2013	10:57:20 AM	H2 valve closed
1/14/2013	10:57:20 AM	BCl3 valve closed
1/14/2013	10:57:20 AM	PH3 valve closed
1/14/2013	10:57:20 AM	SiCl4 pre valve closed
1/14/2013	10:57:20 AM	SiCl4 post valve closed
1/14/2013	10:57:20 AM	Main Vac valve closed
1/14/2013	10:57:20 AM	Bypass valve closed
1/14/2013	10:57:20 AM	Bubbler valve closed
1/14/2013	10:57:20 AM	Helium MFC set to  0.000000
1/14/2013	10:57:20 AM	H2 MFC set to  0.000000
1/14/2013	10:57:20 AM	BCl3 MFC set to  0.000000
1/14/2013	10:57:20 AM	PH3 MFC set to  0.000000
1/14/2013	10:57:20 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:57:20 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:57:20 AM	Tube furnace set to 0
1/14/2013	10:57:23 AM	H2 valve closed
1/14/2013	10:57:23 AM	BCl3 valve closed
1/14/2013	10:57:23 AM	PH3 valve closed
1/14/2013	10:57:23 AM	SiCl4 pre valve closed
1/14/2013	10:57:23 AM	SiCl4 post valve closed
1/14/2013	10:57:23 AM	Main Vac valve closed
1/14/2013	10:57:23 AM	Bypass valve closed
1/14/2013	10:57:23 AM	Bubbler valve closed
1/14/2013	10:57:23 AM	Helium valve opened
1/14/2013	10:57:23 AM	Helium MFC set to  500.000000
1/14/2013	10:57:23 AM	H2 MFC set to  0.000000
1/14/2013	10:57:23 AM	BCl3 MFC set to  0.000000
1/14/2013	10:57:23 AM	PH3 MFC set to  0.000000
1/14/2013	10:57:23 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:57:23 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:57:23 AM	Tube furnace set to 0
1/14/2013	10:58:37 AM	Helium valve closed
1/14/2013	10:58:37 AM	H2 valve closed
1/14/2013	10:58:37 AM	BCl3 valve closed
1/14/2013	10:58:37 AM	PH3 valve closed
1/14/2013	10:58:37 AM	SiCl4 pre valve closed
1/14/2013	10:58:37 AM	SiCl4 post valve closed
1/14/2013	10:58:37 AM	Main Vac valve closed
1/14/2013	10:58:37 AM	Bypass valve closed
1/14/2013	10:58:37 AM	Bubbler valve closed
1/14/2013	10:58:37 AM	Helium MFC set to  0.000000
1/14/2013	10:58:37 AM	H2 MFC set to  0.000000
1/14/2013	10:58:37 AM	BCl3 MFC set to  0.000000
1/14/2013	10:58:37 AM	PH3 MFC set to  0.000000
1/14/2013	10:58:37 AM	SiCl4 MFC set to  0.000000
1/14/2013	10:58:37 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	10:58:37 AM	Tube furnace set to 0
1/14/2013	10:58:38 AM	Run finished at 10:58 AM
1/14/2013	10:58:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2013	11:00:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2013	11:00:09 AM	Recipe started at 11:00 AM
1/14/2013	11:00:09 AM	Helium valve closed
1/14/2013	11:00:09 AM	H2 valve closed
1/14/2013	11:00:09 AM	BCl3 valve closed
1/14/2013	11:00:09 AM	PH3 valve closed
1/14/2013	11:00:09 AM	SiCl4 pre valve closed
1/14/2013	11:00:09 AM	SiCl4 post valve closed
1/14/2013	11:00:09 AM	Main Vac valve closed
1/14/2013	11:00:09 AM	Bubbler valve closed
1/14/2013	11:00:09 AM	Bypass valve opened
1/14/2013	11:00:10 AM	Helium MFC set to  0.000000
1/14/2013	11:00:10 AM	H2 MFC set to  0.000000
1/14/2013	11:00:10 AM	BCl3 MFC set to  0.000000
1/14/2013	11:00:10 AM	PH3 MFC set to  0.000000
1/14/2013	11:00:10 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:00:10 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:00:10 AM	Tube furnace set to 0
1/14/2013	11:01:24 AM	Helium valve closed
1/14/2013	11:01:24 AM	H2 valve closed
1/14/2013	11:01:24 AM	BCl3 valve closed
1/14/2013	11:01:24 AM	PH3 valve closed
1/14/2013	11:01:24 AM	SiCl4 pre valve closed
1/14/2013	11:01:24 AM	SiCl4 post valve closed
1/14/2013	11:01:24 AM	Main Vac valve closed
1/14/2013	11:01:24 AM	Bubbler valve closed
1/14/2013	11:01:24 AM	Bypass valve opened
1/14/2013	11:01:24 AM	Helium MFC set to  0.000000
1/14/2013	11:01:24 AM	H2 MFC set to  0.000000
1/14/2013	11:01:24 AM	BCl3 MFC set to  0.000000
1/14/2013	11:01:24 AM	PH3 MFC set to  0.000000
1/14/2013	11:01:24 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:01:24 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:01:24 AM	Tube furnace set to 0
1/14/2013	11:01:39 AM	Helium valve closed
1/14/2013	11:01:39 AM	H2 valve closed
1/14/2013	11:01:39 AM	BCl3 valve closed
1/14/2013	11:01:39 AM	PH3 valve closed
1/14/2013	11:01:39 AM	SiCl4 pre valve closed
1/14/2013	11:01:39 AM	SiCl4 post valve closed
1/14/2013	11:01:39 AM	Bypass valve closed
1/14/2013	11:01:39 AM	Bubbler valve closed
1/14/2013	11:01:39 AM	Main Vac valve opened
1/14/2013	11:01:39 AM	Helium MFC set to  0.000000
1/14/2013	11:01:39 AM	H2 MFC set to  0.000000
1/14/2013	11:01:39 AM	BCl3 MFC set to  0.000000
1/14/2013	11:01:39 AM	PH3 MFC set to  0.000000
1/14/2013	11:01:39 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:01:39 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:01:39 AM	Tube furnace set to 0
1/14/2013	11:01:40 AM	Run finished at 11:01 AM
1/14/2013	11:01:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2013	11:26:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/14/2013	11:26:39 AM	Recipe started at 11:26 AM
1/14/2013	11:26:39 AM	Helium valve closed
1/14/2013	11:26:39 AM	H2 valve closed
1/14/2013	11:26:39 AM	BCl3 valve closed
1/14/2013	11:26:39 AM	PH3 valve closed
1/14/2013	11:26:39 AM	SiCl4 pre valve closed
1/14/2013	11:26:39 AM	SiCl4 post valve closed
1/14/2013	11:26:39 AM	Main Vac valve closed
1/14/2013	11:26:39 AM	Bubbler valve closed
1/14/2013	11:26:39 AM	Bypass valve opened
1/14/2013	11:26:39 AM	Helium MFC set to  0.000000
1/14/2013	11:26:39 AM	H2 MFC set to  0.000000
1/14/2013	11:26:39 AM	BCl3 MFC set to  0.000000
1/14/2013	11:26:39 AM	PH3 MFC set to  0.000000
1/14/2013	11:26:39 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:26:39 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:26:39 AM	Tube furnace set to 0
1/14/2013	11:26:39 AM	Helium valve closed
1/14/2013	11:26:39 AM	H2 valve closed
1/14/2013	11:26:39 AM	BCl3 valve closed
1/14/2013	11:26:39 AM	PH3 valve closed
1/14/2013	11:26:39 AM	SiCl4 pre valve closed
1/14/2013	11:26:39 AM	SiCl4 post valve closed
1/14/2013	11:26:39 AM	Main Vac valve closed
1/14/2013	11:26:39 AM	Bubbler valve closed
1/14/2013	11:26:39 AM	Bypass valve opened
1/14/2013	11:26:39 AM	Helium MFC set to  0.000000
1/14/2013	11:26:39 AM	H2 MFC set to  0.000000
1/14/2013	11:26:39 AM	BCl3 MFC set to  0.000000
1/14/2013	11:26:39 AM	PH3 MFC set to  0.000000
1/14/2013	11:26:39 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:26:39 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:26:39 AM	Tube furnace set to 0
1/14/2013	11:27:09 AM	Helium valve closed
1/14/2013	11:27:09 AM	H2 valve closed
1/14/2013	11:27:09 AM	BCl3 valve closed
1/14/2013	11:27:09 AM	PH3 valve closed
1/14/2013	11:27:09 AM	SiCl4 pre valve closed
1/14/2013	11:27:09 AM	SiCl4 post valve closed
1/14/2013	11:27:09 AM	Bypass valve closed
1/14/2013	11:27:09 AM	Bubbler valve closed
1/14/2013	11:27:09 AM	Main Vac valve opened
1/14/2013	11:27:09 AM	Helium MFC set to  0.000000
1/14/2013	11:27:09 AM	H2 MFC set to  0.000000
1/14/2013	11:27:09 AM	BCl3 MFC set to  0.000000
1/14/2013	11:27:09 AM	PH3 MFC set to  0.000000
1/14/2013	11:27:09 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:27:09 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:27:10 AM	Tube furnace set to 0
1/14/2013	11:27:40 AM	H2 valve closed
1/14/2013	11:27:40 AM	BCl3 valve closed
1/14/2013	11:27:40 AM	PH3 valve closed
1/14/2013	11:27:40 AM	SiCl4 pre valve closed
1/14/2013	11:27:40 AM	SiCl4 post valve closed
1/14/2013	11:27:40 AM	Bypass valve closed
1/14/2013	11:27:40 AM	Bubbler valve closed
1/14/2013	11:27:40 AM	Helium valve opened
1/14/2013	11:27:40 AM	Main Vac valve opened
1/14/2013	11:27:40 AM	Helium MFC set to  20.000000
1/14/2013	11:27:40 AM	H2 MFC set to  0.000000
1/14/2013	11:27:40 AM	BCl3 MFC set to  0.000000
1/14/2013	11:27:40 AM	PH3 MFC set to  0.000000
1/14/2013	11:27:40 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:27:40 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:27:40 AM	Tube furnace set to 0
1/14/2013	11:28:10 AM	Helium valve closed
1/14/2013	11:28:10 AM	H2 valve closed
1/14/2013	11:28:10 AM	BCl3 valve closed
1/14/2013	11:28:10 AM	PH3 valve closed
1/14/2013	11:28:10 AM	SiCl4 pre valve closed
1/14/2013	11:28:10 AM	SiCl4 post valve closed
1/14/2013	11:28:10 AM	Bypass valve closed
1/14/2013	11:28:10 AM	Bubbler valve closed
1/14/2013	11:28:10 AM	Main Vac valve opened
1/14/2013	11:28:10 AM	Helium MFC set to  0.000000
1/14/2013	11:28:10 AM	H2 MFC set to  0.000000
1/14/2013	11:28:10 AM	BCl3 MFC set to  0.000000
1/14/2013	11:28:10 AM	PH3 MFC set to  0.000000
1/14/2013	11:28:10 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:28:10 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:28:10 AM	Tube furnace set to 0
1/14/2013	11:28:40 AM	H2 valve closed
1/14/2013	11:28:40 AM	BCl3 valve closed
1/14/2013	11:28:40 AM	PH3 valve closed
1/14/2013	11:28:40 AM	SiCl4 pre valve closed
1/14/2013	11:28:40 AM	SiCl4 post valve closed
1/14/2013	11:28:40 AM	Bypass valve closed
1/14/2013	11:28:40 AM	Bubbler valve closed
1/14/2013	11:28:40 AM	Helium valve opened
1/14/2013	11:28:40 AM	Main Vac valve opened
1/14/2013	11:28:40 AM	Helium MFC set to  20.000000
1/14/2013	11:28:40 AM	H2 MFC set to  0.000000
1/14/2013	11:28:40 AM	BCl3 MFC set to  0.000000
1/14/2013	11:28:40 AM	PH3 MFC set to  0.000000
1/14/2013	11:28:40 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:28:40 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:28:40 AM	Tube furnace set to 0
1/14/2013	11:29:10 AM	Helium valve closed
1/14/2013	11:29:10 AM	H2 valve closed
1/14/2013	11:29:10 AM	BCl3 valve closed
1/14/2013	11:29:10 AM	PH3 valve closed
1/14/2013	11:29:10 AM	SiCl4 pre valve closed
1/14/2013	11:29:10 AM	SiCl4 post valve closed
1/14/2013	11:29:10 AM	Bypass valve closed
1/14/2013	11:29:10 AM	Bubbler valve closed
1/14/2013	11:29:10 AM	Main Vac valve opened
1/14/2013	11:29:10 AM	Helium MFC set to  0.000000
1/14/2013	11:29:10 AM	H2 MFC set to  0.000000
1/14/2013	11:29:10 AM	BCl3 MFC set to  0.000000
1/14/2013	11:29:10 AM	PH3 MFC set to  0.000000
1/14/2013	11:29:10 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:29:10 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:29:11 AM	Tube furnace set to 0
1/14/2013	11:29:41 AM	H2 valve closed
1/14/2013	11:29:41 AM	BCl3 valve closed
1/14/2013	11:29:41 AM	PH3 valve closed
1/14/2013	11:29:41 AM	SiCl4 pre valve closed
1/14/2013	11:29:41 AM	SiCl4 post valve closed
1/14/2013	11:29:41 AM	Bypass valve closed
1/14/2013	11:29:41 AM	Bubbler valve closed
1/14/2013	11:29:41 AM	Helium valve opened
1/14/2013	11:29:41 AM	Main Vac valve opened
1/14/2013	11:29:41 AM	Helium MFC set to  20.000000
1/14/2013	11:29:41 AM	H2 MFC set to  0.000000
1/14/2013	11:29:41 AM	BCl3 MFC set to  0.000000
1/14/2013	11:29:41 AM	PH3 MFC set to  0.000000
1/14/2013	11:29:41 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:29:41 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:29:41 AM	Tube furnace set to 0
1/14/2013	11:30:11 AM	Helium valve closed
1/14/2013	11:30:11 AM	H2 valve closed
1/14/2013	11:30:11 AM	BCl3 valve closed
1/14/2013	11:30:11 AM	PH3 valve closed
1/14/2013	11:30:11 AM	SiCl4 pre valve closed
1/14/2013	11:30:11 AM	SiCl4 post valve closed
1/14/2013	11:30:11 AM	Bypass valve closed
1/14/2013	11:30:11 AM	Bubbler valve closed
1/14/2013	11:30:11 AM	Main Vac valve opened
1/14/2013	11:30:11 AM	Helium MFC set to  0.000000
1/14/2013	11:30:11 AM	H2 MFC set to  0.000000
1/14/2013	11:30:11 AM	BCl3 MFC set to  0.000000
1/14/2013	11:30:11 AM	PH3 MFC set to  0.000000
1/14/2013	11:30:11 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:30:11 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:30:11 AM	Tube furnace set to 0
1/14/2013	11:30:41 AM	H2 valve closed
1/14/2013	11:30:41 AM	BCl3 valve closed
1/14/2013	11:30:41 AM	PH3 valve closed
1/14/2013	11:30:41 AM	SiCl4 pre valve closed
1/14/2013	11:30:41 AM	SiCl4 post valve closed
1/14/2013	11:30:41 AM	Bypass valve closed
1/14/2013	11:30:41 AM	Bubbler valve closed
1/14/2013	11:30:41 AM	Helium valve opened
1/14/2013	11:30:41 AM	Main Vac valve opened
1/14/2013	11:30:41 AM	Helium MFC set to  20.000000
1/14/2013	11:30:41 AM	H2 MFC set to  0.000000
1/14/2013	11:30:41 AM	BCl3 MFC set to  0.000000
1/14/2013	11:30:41 AM	PH3 MFC set to  0.000000
1/14/2013	11:30:41 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:30:41 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:30:41 AM	Tube furnace set to 0
1/14/2013	11:31:11 AM	Helium valve closed
1/14/2013	11:31:11 AM	H2 valve closed
1/14/2013	11:31:11 AM	BCl3 valve closed
1/14/2013	11:31:11 AM	PH3 valve closed
1/14/2013	11:31:11 AM	SiCl4 pre valve closed
1/14/2013	11:31:11 AM	SiCl4 post valve closed
1/14/2013	11:31:11 AM	Bypass valve closed
1/14/2013	11:31:11 AM	Bubbler valve closed
1/14/2013	11:31:11 AM	Main Vac valve opened
1/14/2013	11:31:11 AM	Helium MFC set to  0.000000
1/14/2013	11:31:11 AM	H2 MFC set to  0.000000
1/14/2013	11:31:11 AM	BCl3 MFC set to  0.000000
1/14/2013	11:31:11 AM	PH3 MFC set to  0.000000
1/14/2013	11:31:11 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:31:11 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:31:12 AM	Tube furnace set to 0
1/14/2013	11:31:42 AM	H2 valve closed
1/14/2013	11:31:42 AM	BCl3 valve closed
1/14/2013	11:31:42 AM	PH3 valve closed
1/14/2013	11:31:42 AM	SiCl4 pre valve closed
1/14/2013	11:31:42 AM	SiCl4 post valve closed
1/14/2013	11:31:42 AM	Bypass valve closed
1/14/2013	11:31:42 AM	Bubbler valve closed
1/14/2013	11:31:42 AM	Helium valve opened
1/14/2013	11:31:42 AM	Main Vac valve opened
1/14/2013	11:31:42 AM	Helium MFC set to  20.000000
1/14/2013	11:31:42 AM	H2 MFC set to  0.000000
1/14/2013	11:31:42 AM	BCl3 MFC set to  0.000000
1/14/2013	11:31:42 AM	PH3 MFC set to  0.000000
1/14/2013	11:31:42 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:31:42 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:31:42 AM	Tube furnace set to 0
1/14/2013	11:32:12 AM	Helium valve closed
1/14/2013	11:32:12 AM	H2 valve closed
1/14/2013	11:32:12 AM	BCl3 valve closed
1/14/2013	11:32:12 AM	PH3 valve closed
1/14/2013	11:32:12 AM	SiCl4 pre valve closed
1/14/2013	11:32:12 AM	SiCl4 post valve closed
1/14/2013	11:32:12 AM	Bypass valve closed
1/14/2013	11:32:12 AM	Bubbler valve closed
1/14/2013	11:32:12 AM	Main Vac valve opened
1/14/2013	11:32:12 AM	Helium MFC set to  0.000000
1/14/2013	11:32:12 AM	H2 MFC set to  0.000000
1/14/2013	11:32:12 AM	BCl3 MFC set to  0.000000
1/14/2013	11:32:12 AM	PH3 MFC set to  0.000000
1/14/2013	11:32:12 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:32:12 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:32:12 AM	Tube furnace set to 0
1/14/2013	11:32:42 AM	H2 valve closed
1/14/2013	11:32:42 AM	BCl3 valve closed
1/14/2013	11:32:42 AM	PH3 valve closed
1/14/2013	11:32:42 AM	SiCl4 pre valve closed
1/14/2013	11:32:42 AM	SiCl4 post valve closed
1/14/2013	11:32:42 AM	Bypass valve closed
1/14/2013	11:32:42 AM	Bubbler valve closed
1/14/2013	11:32:42 AM	Helium valve opened
1/14/2013	11:32:42 AM	Main Vac valve opened
1/14/2013	11:32:42 AM	Helium MFC set to  20.000000
1/14/2013	11:32:42 AM	H2 MFC set to  0.000000
1/14/2013	11:32:42 AM	BCl3 MFC set to  0.000000
1/14/2013	11:32:42 AM	PH3 MFC set to  0.000000
1/14/2013	11:32:42 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:32:42 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:32:42 AM	Tube furnace set to 0
1/14/2013	11:33:12 AM	Helium valve closed
1/14/2013	11:33:12 AM	H2 valve closed
1/14/2013	11:33:12 AM	BCl3 valve closed
1/14/2013	11:33:12 AM	PH3 valve closed
1/14/2013	11:33:12 AM	SiCl4 pre valve closed
1/14/2013	11:33:12 AM	SiCl4 post valve closed
1/14/2013	11:33:12 AM	Bypass valve closed
1/14/2013	11:33:12 AM	Bubbler valve closed
1/14/2013	11:33:12 AM	Main Vac valve opened
1/14/2013	11:33:12 AM	Helium MFC set to  0.000000
1/14/2013	11:33:12 AM	H2 MFC set to  0.000000
1/14/2013	11:33:12 AM	BCl3 MFC set to  0.000000
1/14/2013	11:33:12 AM	PH3 MFC set to  0.000000
1/14/2013	11:33:12 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:33:12 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:33:13 AM	Tube furnace set to 0
1/14/2013	11:33:43 AM	H2 valve closed
1/14/2013	11:33:43 AM	BCl3 valve closed
1/14/2013	11:33:43 AM	PH3 valve closed
1/14/2013	11:33:43 AM	SiCl4 pre valve closed
1/14/2013	11:33:43 AM	SiCl4 post valve closed
1/14/2013	11:33:43 AM	Bypass valve closed
1/14/2013	11:33:43 AM	Bubbler valve closed
1/14/2013	11:33:43 AM	Helium valve opened
1/14/2013	11:33:43 AM	Main Vac valve opened
1/14/2013	11:33:43 AM	Helium MFC set to  20.000000
1/14/2013	11:33:43 AM	H2 MFC set to  0.000000
1/14/2013	11:33:43 AM	BCl3 MFC set to  0.000000
1/14/2013	11:33:43 AM	PH3 MFC set to  0.000000
1/14/2013	11:33:43 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:33:43 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:33:43 AM	Tube furnace set to 0
1/14/2013	11:34:13 AM	Helium valve closed
1/14/2013	11:34:13 AM	H2 valve closed
1/14/2013	11:34:13 AM	BCl3 valve closed
1/14/2013	11:34:13 AM	PH3 valve closed
1/14/2013	11:34:13 AM	SiCl4 pre valve closed
1/14/2013	11:34:13 AM	SiCl4 post valve closed
1/14/2013	11:34:13 AM	Bypass valve closed
1/14/2013	11:34:13 AM	Bubbler valve closed
1/14/2013	11:34:13 AM	Main Vac valve opened
1/14/2013	11:34:13 AM	Helium MFC set to  0.000000
1/14/2013	11:34:13 AM	H2 MFC set to  0.000000
1/14/2013	11:34:13 AM	BCl3 MFC set to  0.000000
1/14/2013	11:34:13 AM	PH3 MFC set to  0.000000
1/14/2013	11:34:13 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:34:13 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:34:13 AM	Tube furnace set to 0
1/14/2013	11:34:43 AM	H2 valve closed
1/14/2013	11:34:43 AM	BCl3 valve closed
1/14/2013	11:34:43 AM	PH3 valve closed
1/14/2013	11:34:43 AM	SiCl4 pre valve closed
1/14/2013	11:34:43 AM	SiCl4 post valve closed
1/14/2013	11:34:43 AM	Bypass valve closed
1/14/2013	11:34:43 AM	Bubbler valve closed
1/14/2013	11:34:43 AM	Helium valve opened
1/14/2013	11:34:43 AM	Main Vac valve opened
1/14/2013	11:34:43 AM	Helium MFC set to  20.000000
1/14/2013	11:34:43 AM	H2 MFC set to  0.000000
1/14/2013	11:34:43 AM	BCl3 MFC set to  0.000000
1/14/2013	11:34:43 AM	PH3 MFC set to  0.000000
1/14/2013	11:34:43 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:34:43 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:34:43 AM	Tube furnace set to 0
1/14/2013	11:35:13 AM	Helium valve closed
1/14/2013	11:35:13 AM	H2 valve closed
1/14/2013	11:35:13 AM	BCl3 valve closed
1/14/2013	11:35:13 AM	PH3 valve closed
1/14/2013	11:35:13 AM	SiCl4 pre valve closed
1/14/2013	11:35:13 AM	SiCl4 post valve closed
1/14/2013	11:35:13 AM	Bypass valve closed
1/14/2013	11:35:13 AM	Bubbler valve closed
1/14/2013	11:35:13 AM	Main Vac valve opened
1/14/2013	11:35:13 AM	Helium MFC set to  0.000000
1/14/2013	11:35:13 AM	H2 MFC set to  0.000000
1/14/2013	11:35:13 AM	BCl3 MFC set to  0.000000
1/14/2013	11:35:13 AM	PH3 MFC set to  0.000000
1/14/2013	11:35:13 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:35:13 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:35:14 AM	Tube furnace set to 0
1/14/2013	11:35:44 AM	H2 valve closed
1/14/2013	11:35:44 AM	BCl3 valve closed
1/14/2013	11:35:44 AM	PH3 valve closed
1/14/2013	11:35:44 AM	SiCl4 pre valve closed
1/14/2013	11:35:44 AM	SiCl4 post valve closed
1/14/2013	11:35:44 AM	Bypass valve closed
1/14/2013	11:35:44 AM	Bubbler valve closed
1/14/2013	11:35:44 AM	Helium valve opened
1/14/2013	11:35:44 AM	Main Vac valve opened
1/14/2013	11:35:44 AM	Helium MFC set to  20.000000
1/14/2013	11:35:44 AM	H2 MFC set to  0.000000
1/14/2013	11:35:44 AM	BCl3 MFC set to  0.000000
1/14/2013	11:35:44 AM	PH3 MFC set to  0.000000
1/14/2013	11:35:44 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:35:44 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:35:44 AM	Tube furnace set to 0
1/14/2013	11:36:14 AM	Helium valve closed
1/14/2013	11:36:14 AM	H2 valve closed
1/14/2013	11:36:14 AM	BCl3 valve closed
1/14/2013	11:36:14 AM	PH3 valve closed
1/14/2013	11:36:14 AM	SiCl4 pre valve closed
1/14/2013	11:36:14 AM	SiCl4 post valve closed
1/14/2013	11:36:14 AM	Bypass valve closed
1/14/2013	11:36:14 AM	Bubbler valve closed
1/14/2013	11:36:14 AM	Main Vac valve opened
1/14/2013	11:36:14 AM	Helium MFC set to  0.000000
1/14/2013	11:36:14 AM	H2 MFC set to  0.000000
1/14/2013	11:36:14 AM	BCl3 MFC set to  0.000000
1/14/2013	11:36:14 AM	PH3 MFC set to  0.000000
1/14/2013	11:36:14 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:36:14 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:36:14 AM	Tube furnace set to 0
1/14/2013	11:36:44 AM	H2 valve closed
1/14/2013	11:36:44 AM	BCl3 valve closed
1/14/2013	11:36:44 AM	PH3 valve closed
1/14/2013	11:36:44 AM	SiCl4 pre valve closed
1/14/2013	11:36:44 AM	SiCl4 post valve closed
1/14/2013	11:36:44 AM	Bypass valve closed
1/14/2013	11:36:44 AM	Bubbler valve closed
1/14/2013	11:36:44 AM	Helium valve opened
1/14/2013	11:36:44 AM	Main Vac valve opened
1/14/2013	11:36:44 AM	Helium MFC set to  20.000000
1/14/2013	11:36:44 AM	H2 MFC set to  0.000000
1/14/2013	11:36:44 AM	BCl3 MFC set to  0.000000
1/14/2013	11:36:44 AM	PH3 MFC set to  0.000000
1/14/2013	11:36:44 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:36:44 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:36:44 AM	Tube furnace set to 0
1/14/2013	11:37:14 AM	Helium valve closed
1/14/2013	11:37:14 AM	H2 valve closed
1/14/2013	11:37:14 AM	BCl3 valve closed
1/14/2013	11:37:14 AM	PH3 valve closed
1/14/2013	11:37:14 AM	SiCl4 pre valve closed
1/14/2013	11:37:14 AM	SiCl4 post valve closed
1/14/2013	11:37:14 AM	Bypass valve closed
1/14/2013	11:37:14 AM	Bubbler valve closed
1/14/2013	11:37:14 AM	Main Vac valve opened
1/14/2013	11:37:14 AM	Helium MFC set to  0.000000
1/14/2013	11:37:14 AM	H2 MFC set to  0.000000
1/14/2013	11:37:14 AM	BCl3 MFC set to  0.000000
1/14/2013	11:37:14 AM	PH3 MFC set to  0.000000
1/14/2013	11:37:14 AM	SiCl4 MFC set to  0.000000
1/14/2013	11:37:14 AM	Bypass solenoid MFC set to  0.000000
1/14/2013	11:37:15 AM	Tube furnace set to 0
1/14/2013	11:37:16 AM	Run finished at 11:37 AM
1/14/2013	11:37:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/14/2013	12:54:02 PM	Recipe started at 12:54 PM
1/14/2013	12:54:02 PM	Helium valve closed
1/14/2013	12:54:02 PM	H2 valve closed
1/14/2013	12:54:02 PM	BCl3 valve closed
1/14/2013	12:54:02 PM	PH3 valve closed
1/14/2013	12:54:02 PM	SiCl4 pre valve closed
1/14/2013	12:54:02 PM	SiCl4 post valve closed
1/14/2013	12:54:02 PM	Main Vac valve closed
1/14/2013	12:54:02 PM	Bypass valve closed
1/14/2013	12:54:02 PM	Bubbler valve closed
1/14/2013	12:54:02 PM	Helium MFC set to  0.000000
1/14/2013	12:54:02 PM	H2 MFC set to  0.000000
1/14/2013	12:54:02 PM	BCl3 MFC set to  0.000000
1/14/2013	12:54:02 PM	PH3 MFC set to  0.000000
1/14/2013	12:54:02 PM	SiCl4 MFC set to  0.000000
1/14/2013	12:54:02 PM	Bypass solenoid MFC set to  0.000000
1/14/2013	12:54:02 PM	Tube furnace set to 0
1/14/2013	12:54:05 PM	Helium valve closed
1/14/2013	12:54:05 PM	BCl3 valve closed
1/14/2013	12:54:05 PM	PH3 valve closed
1/14/2013	12:54:05 PM	SiCl4 pre valve closed
1/14/2013	12:54:05 PM	SiCl4 post valve closed
1/14/2013	12:54:05 PM	Main Vac valve closed
1/14/2013	12:54:05 PM	Bypass valve closed
1/14/2013	12:54:05 PM	Bubbler valve closed
1/14/2013	12:54:05 PM	H2 valve opened
1/14/2013	12:54:05 PM	Helium MFC set to  0.000000
1/14/2013	12:54:05 PM	H2 MFC set to  500.000000
1/14/2013	12:54:05 PM	BCl3 MFC set to  0.000000
1/14/2013	12:54:05 PM	PH3 MFC set to  0.000000
1/14/2013	12:54:05 PM	SiCl4 MFC set to  0.000000
1/14/2013	12:54:05 PM	Bypass solenoid MFC set to  0.000000
1/14/2013	12:54:05 PM	Tube furnace set to 0
1/14/2013	12:55:21 PM	Helium valve closed
1/14/2013	12:55:21 PM	BCl3 valve closed
1/14/2013	12:55:21 PM	PH3 valve closed
1/14/2013	12:55:21 PM	SiCl4 pre valve closed
1/14/2013	12:55:21 PM	SiCl4 post valve closed
1/14/2013	12:55:21 PM	Main Vac valve closed
1/14/2013	12:55:21 PM	Bypass valve closed
1/14/2013	12:55:21 PM	H2 valve opened
1/14/2013	12:55:21 PM	Bubbler valve opened
1/14/2013	12:55:21 PM	Helium MFC set to  0.000000
1/14/2013	12:55:21 PM	H2 MFC set to  500.000000
1/14/2013	12:55:21 PM	BCl3 MFC set to  0.000000
1/14/2013	12:55:21 PM	PH3 MFC set to  0.000000
1/14/2013	12:55:21 PM	SiCl4 MFC set to  0.000000
1/14/2013	12:55:21 PM	Bypass solenoid MFC set to  0.000000
1/14/2013	12:55:21 PM	Tube furnace set to 0
1/14/2013	12:55:22 PM	Helium valve closed
1/14/2013	12:55:22 PM	BCl3 valve closed
1/14/2013	12:55:22 PM	PH3 valve closed
1/14/2013	12:55:22 PM	SiCl4 pre valve closed
1/14/2013	12:55:22 PM	SiCl4 post valve closed
1/14/2013	12:55:22 PM	Main Vac valve closed
1/14/2013	12:55:22 PM	Bypass valve closed
1/14/2013	12:55:22 PM	H2 valve opened
1/14/2013	12:55:22 PM	Bubbler valve opened
1/14/2013	12:55:22 PM	Helium MFC set to  0.000000
1/14/2013	12:55:22 PM	H2 MFC set to  500.000000
1/14/2013	12:55:22 PM	BCl3 MFC set to  0.000000
1/14/2013	12:55:22 PM	PH3 MFC set to  0.000000
1/14/2013	12:55:22 PM	SiCl4 MFC set to  0.000000
1/14/2013	12:55:22 PM	Bypass solenoid MFC set to  0.000000
1/14/2013	12:55:22 PM	Tube furnace set to 1000
1/14/2013	1:15:22 PM	Helium valve closed
1/14/2013	1:15:22 PM	PH3 valve closed
1/14/2013	1:15:22 PM	Main Vac valve closed
1/14/2013	1:15:22 PM	Bypass valve closed
1/14/2013	1:15:22 PM	H2 valve opened
1/14/2013	1:15:22 PM	BCl3 valve opened
1/14/2013	1:15:22 PM	SiCl4 pre valve opened
1/14/2013	1:15:22 PM	SiCl4 post valve opened
1/14/2013	1:15:22 PM	Bubbler valve opened
1/14/2013	1:15:22 PM	Helium MFC set to  0.000000
1/14/2013	1:15:22 PM	H2 MFC set to  450.000000
1/14/2013	1:15:22 PM	BCl3 MFC set to  1.300000
1/14/2013	1:15:22 PM	PH3 MFC set to  0.000000
1/14/2013	1:15:22 PM	SiCl4 MFC set to  50.000000
1/14/2013	1:15:22 PM	Bypass solenoid MFC set to  0.000000
1/14/2013	1:15:22 PM	Tube furnace set to 1000
1/14/2013	1:35:22 PM	Helium valve closed
1/14/2013	1:35:22 PM	BCl3 valve closed
1/14/2013	1:35:22 PM	PH3 valve closed
1/14/2013	1:35:22 PM	SiCl4 pre valve closed
1/14/2013	1:35:22 PM	SiCl4 post valve closed
1/14/2013	1:35:22 PM	Main Vac valve closed
1/14/2013	1:35:22 PM	Bypass valve closed
1/14/2013	1:35:23 PM	H2 valve opened
1/14/2013	1:35:23 PM	Bubbler valve opened
1/14/2013	1:35:23 PM	Helium MFC set to  0.000000
1/14/2013	1:35:23 PM	H2 MFC set to  500.000000
1/14/2013	1:35:23 PM	BCl3 MFC set to  0.000000
1/14/2013	1:35:23 PM	PH3 MFC set to  0.000000
1/14/2013	1:35:23 PM	SiCl4 MFC set to  0.000000
1/14/2013	1:35:23 PM	Bypass solenoid MFC set to  0.000000
1/14/2013	1:35:23 PM	Tube furnace set to 750
1/14/2013	1:40:23 PM	H2 valve closed
1/14/2013	1:40:23 PM	BCl3 valve closed
1/14/2013	1:40:23 PM	PH3 valve closed
1/14/2013	1:40:23 PM	SiCl4 pre valve closed
1/14/2013	1:40:23 PM	SiCl4 post valve closed
1/14/2013	1:40:23 PM	Main Vac valve closed
1/14/2013	1:40:23 PM	Bypass valve closed
1/14/2013	1:40:23 PM	Helium valve opened
1/14/2013	1:40:23 PM	Bubbler valve opened
1/14/2013	1:40:23 PM	Helium MFC set to  500.000000
1/14/2013	1:40:23 PM	H2 MFC set to  0.000000
1/14/2013	1:40:23 PM	BCl3 MFC set to  0.000000
1/14/2013	1:40:23 PM	PH3 MFC set to  0.000000
1/14/2013	1:40:23 PM	SiCl4 MFC set to  0.000000
1/14/2013	1:40:23 PM	Bypass solenoid MFC set to  0.000000
1/14/2013	1:40:23 PM	Tube furnace set to 0
1/14/2013	2:00:23 PM	Helium valve closed
1/14/2013	2:00:23 PM	H2 valve closed
1/14/2013	2:00:23 PM	BCl3 valve closed
1/14/2013	2:00:23 PM	PH3 valve closed
1/14/2013	2:00:23 PM	SiCl4 pre valve closed
1/14/2013	2:00:23 PM	SiCl4 post valve closed
1/14/2013	2:00:23 PM	Main Vac valve closed
1/14/2013	2:00:23 PM	Bypass valve closed
1/14/2013	2:00:23 PM	Bubbler valve closed
1/14/2013	2:00:23 PM	Helium MFC set to  0.000000
1/14/2013	2:00:23 PM	H2 MFC set to  0.000000
1/14/2013	2:00:23 PM	BCl3 MFC set to  0.000000
1/14/2013	2:00:23 PM	PH3 MFC set to  0.000000
1/14/2013	2:00:23 PM	SiCl4 MFC set to  0.000000
1/14/2013	2:00:23 PM	Bypass solenoid MFC set to  0.000000
1/14/2013	2:00:23 PM	Tube furnace set to 0
1/14/2013	2:00:24 PM	Run finished at 2:00 PM
1/14/2013	6:47:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2013	6:47:24 PM	Recipe started at 6:47 PM
1/14/2013	6:47:24 PM	Helium valve closed
1/14/2013	6:47:24 PM	H2 valve closed
1/14/2013	6:47:24 PM	BCl3 valve closed
1/14/2013	6:47:24 PM	PH3 valve closed
1/14/2013	6:47:24 PM	SiCl4 pre valve closed
1/14/2013	6:47:24 PM	SiCl4 post valve closed
1/14/2013	6:47:24 PM	Main Vac valve closed
1/14/2013	6:47:24 PM	Bypass valve closed
1/14/2013	6:47:24 PM	Bubbler valve closed
1/14/2013	6:47:24 PM	Helium MFC set to  0.000000
1/14/2013	6:47:24 PM	H2 MFC set to  0.000000
1/14/2013	6:47:24 PM	BCl3 MFC set to  0.000000
1/14/2013	6:47:25 PM	PH3 MFC set to  0.000000
1/14/2013	6:47:25 PM	SiCl4 MFC set to  0.000000
1/14/2013	6:47:25 PM	Bypass solenoid MFC set to  0.000000
1/14/2013	6:47:25 PM	Tube furnace set to 0
1/14/2013	6:47:28 PM	H2 valve closed
1/14/2013	6:47:28 PM	BCl3 valve closed
1/14/2013	6:47:28 PM	PH3 valve closed
1/14/2013	6:47:28 PM	SiCl4 pre valve closed
1/14/2013	6:47:28 PM	SiCl4 post valve closed
1/14/2013	6:47:28 PM	Main Vac valve closed
1/14/2013	6:47:28 PM	Bypass valve closed
1/14/2013	6:47:28 PM	Bubbler valve closed
1/14/2013	6:47:28 PM	Helium valve opened
1/14/2013	6:47:28 PM	Helium MFC set to  500.000000
1/14/2013	6:47:28 PM	H2 MFC set to  0.000000
1/14/2013	6:47:28 PM	BCl3 MFC set to  0.000000
1/14/2013	6:47:28 PM	PH3 MFC set to  0.000000
1/14/2013	6:47:28 PM	SiCl4 MFC set to  0.000000
1/14/2013	6:47:28 PM	Bypass solenoid MFC set to  0.000000
1/14/2013	6:47:28 PM	Tube furnace set to 0
1/14/2013	6:47:29 PM	Helium valve closed
1/14/2013	6:47:29 PM	H2 valve closed
1/14/2013	6:47:29 PM	BCl3 valve closed
1/14/2013	6:47:29 PM	PH3 valve closed
1/14/2013	6:47:29 PM	SiCl4 pre valve closed
1/14/2013	6:47:29 PM	SiCl4 post valve closed
1/14/2013	6:47:29 PM	Main Vac valve closed
1/14/2013	6:47:29 PM	Bypass valve closed
1/14/2013	6:47:29 PM	Bubbler valve closed
1/14/2013	6:47:29 PM	Helium MFC set to  0.000000
1/14/2013	6:47:29 PM	H2 MFC set to  0.000000
1/14/2013	6:47:29 PM	BCl3 MFC set to  0.000000
1/14/2013	6:47:29 PM	PH3 MFC set to  0.000000
1/14/2013	6:47:29 PM	SiCl4 MFC set to  0.000000
1/14/2013	6:47:29 PM	Bypass solenoid MFC set to  0.000000
1/14/2013	6:47:29 PM	Tube furnace set to 0
1/14/2013	6:47:30 PM	Run finished at 6:47 PM
1/14/2013	6:47:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2013	6:51:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2013	6:51:07 PM	Recipe started at 6:51 PM
1/14/2013	6:51:07 PM	Helium valve closed
1/14/2013	6:51:07 PM	H2 valve closed
1/14/2013	6:51:07 PM	BCl3 valve closed
1/14/2013	6:51:07 PM	PH3 valve closed
1/14/2013	6:51:07 PM	SiCl4 pre valve closed
1/14/2013	6:51:07 PM	SiCl4 post valve closed
1/14/2013	6:51:07 PM	Main Vac valve closed
1/14/2013	6:51:07 PM	Bubbler valve closed
1/14/2013	6:51:07 PM	Bypass valve opened
1/14/2013	6:51:07 PM	Helium MFC set to  0.000000
1/14/2013	6:51:07 PM	H2 MFC set to  0.000000
1/14/2013	6:51:07 PM	BCl3 MFC set to  0.000000
1/14/2013	6:51:07 PM	PH3 MFC set to  0.000000
1/14/2013	6:51:07 PM	SiCl4 MFC set to  0.000000
1/14/2013	6:51:07 PM	Bypass solenoid MFC set to  0.000000
1/14/2013	6:51:07 PM	Tube furnace set to 0
1/14/2013	6:52:27 PM	Helium valve closed
1/14/2013	6:52:27 PM	H2 valve closed
1/14/2013	6:52:27 PM	BCl3 valve closed
1/14/2013	6:52:27 PM	PH3 valve closed
1/14/2013	6:52:27 PM	SiCl4 pre valve closed
1/14/2013	6:52:27 PM	SiCl4 post valve closed
1/14/2013	6:52:27 PM	Main Vac valve closed
1/14/2013	6:52:27 PM	Bubbler valve closed
1/14/2013	6:52:27 PM	Bypass valve opened
1/14/2013	6:52:27 PM	Helium MFC set to  0.000000
1/14/2013	6:52:27 PM	H2 MFC set to  0.000000
1/14/2013	6:52:27 PM	BCl3 MFC set to  0.000000
1/14/2013	6:52:27 PM	PH3 MFC set to  0.000000
1/14/2013	6:52:27 PM	SiCl4 MFC set to  0.000000
1/14/2013	6:52:27 PM	Bypass solenoid MFC set to  0.000000
1/14/2013	6:52:27 PM	Tube furnace set to 0
1/14/2013	6:53:27 PM	Helium valve closed
1/14/2013	6:53:27 PM	H2 valve closed
1/14/2013	6:53:27 PM	BCl3 valve closed
1/14/2013	6:53:27 PM	PH3 valve closed
1/14/2013	6:53:27 PM	SiCl4 pre valve closed
1/14/2013	6:53:27 PM	SiCl4 post valve closed
1/14/2013	6:53:27 PM	Bypass valve closed
1/14/2013	6:53:27 PM	Bubbler valve closed
1/14/2013	6:53:27 PM	Main Vac valve opened
1/14/2013	6:53:27 PM	Helium MFC set to  0.000000
1/14/2013	6:53:27 PM	H2 MFC set to  0.000000
1/14/2013	6:53:27 PM	BCl3 MFC set to  0.000000
1/14/2013	6:53:27 PM	PH3 MFC set to  0.000000
1/14/2013	6:53:27 PM	SiCl4 MFC set to  0.000000
1/14/2013	6:53:27 PM	Bypass solenoid MFC set to  0.000000
1/14/2013	6:53:27 PM	Tube furnace set to 0
1/14/2013	6:53:28 PM	Run finished at 6:53 PM
1/14/2013	6:53:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
